Inventor
PAN HENG
US19 patents
⚠️ This page may combine multiple inventors who share the name “PAN HENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS9558982B2Jan 31, 2017
Minimal contact edge ring for rapid thermal processing
APPLIED MATERIALS INC12 citations80
US9728401B2Aug 8, 2017
Methods for conformal treatment of dielectric films with low thermal budget
APPLIED MATERIALS INC2 citations72
US10886122B2Jan 5, 2021
Methods for conformal treatment of dielectric films with low thermal budget
APPLIED MATERIALS INC0 citations62
US10211046B2Feb 19, 2019
Substrate support ring for more uniform layer thickness
APPLIED MATERIALS INC0 citations52
US10714333B2Jul 14, 2020
Apparatus and method for selective oxidation at lower temperature using remote plasma source
APPLIED MATERIALS INC0 citations49
US9012336B2Apr 21, 2015
Method for conformal treatment of dielectric films using inductively coupled plasma
APPLIED MATERIALS INC1 citations48
US9768052B2Sep 19, 2017
Minimal contact edge ring for rapid thermal processing
APPLIED MATERIALS INC0 citations46