Inventor
ROGERS MATTHEW SCOTT
US12 patents
⚠️ This page may combine multiple inventors who share the name “ROGERS MATTHEW SCOTT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS9023700B2May 5, 2015
Method and apparatus for single step selective nitridation
APPLIED MATERIALS INC5 citations83
US11581408B2Feb 14, 2023
Method and apparatus for selective nitridation process
APPLIED MATERIALS INC1 citations72
US9728401B2Aug 8, 2017
Methods for conformal treatment of dielectric films with low thermal budget
APPLIED MATERIALS INC2 citations72
US10886122B2Jan 5, 2021
Methods for conformal treatment of dielectric films with low thermal budget
APPLIED MATERIALS INC0 citations62
US10950698B2Mar 16, 2021
Method and apparatus for selective nitridation process
APPLIED MATERIALS INC0 citations61
US10714333B2Jul 14, 2020
Apparatus and method for selective oxidation at lower temperature using remote plasma source
APPLIED MATERIALS INC0 citations49
US9012336B2Apr 21, 2015
Method for conformal treatment of dielectric films using inductively coupled plasma
APPLIED MATERIALS INC1 citations48
ROGERS MATTHEW SCOTT
3 patentsUS8524589B2Sep 3, 2013
Plasma treatment of silicon nitride and silicon oxynitride
ROGERS MATTHEW SCOTT5 citations68
US9809881B2Nov 7, 2017
Method and apparatus for multizone plasma generation
ROGERS MATTHEW SCOTT0 citations49
US9054038B2Jun 9, 2015
Floating gates and methods of formation
ROGERS MATTHEW SCOTT0 citations42