Inventor
HOUBEN MARTIJN
NL31 patents
⚠️ This page may combine multiple inventors who share the name “HOUBEN MARTIJN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
23 patentsUS10324382B2Jun 18, 2019
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV7 citations83
US9971252B2May 15, 2018
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations83
US9785055B2Oct 10, 2017
Object holder and lithographic apparatus
ASML NETHERLANDS BV7 citations83
US9575419B2Feb 21, 2017
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations83
US9507275B2Nov 29, 2016
Support apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations83
US10747126B2Aug 18, 2020
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations72
US10747125B2Aug 18, 2020
Support apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations72
US10453734B2Oct 22, 2019
Substrate holder, a lithographic apparatus and method of manufacturing devices
ASML NETHERLANDS BV3 citations72
US10120292B2Nov 6, 2018
Support apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations72
US9939736B2Apr 10, 2018
Substrate holder and support table for lithography
ASML NETHERLANDS BV2 citations72
US9915877B2Mar 13, 2018
Object holder and lithographic apparatus
ASML NETHERLANDS BV3 citations72
US9740110B2Aug 22, 2017
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations72
US10520837B2Dec 31, 2019
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations71
US9946172B2Apr 17, 2018
System for positioning an object in lithography
ASML NETHERLANDS BV2 citations71
US9835957B2Dec 5, 2017
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations67
US11650511B2May 16, 2023
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations62
US11300890B2Apr 12, 2022
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations61
US8384882B2Feb 26, 2013
Calibration method and lithographic apparatus for calibrating an optimum take over height of a substrate
ASML NETHERLANDS BV4 citations61
US11385547B2Jul 12, 2022
Extraction body for lithographic apparatus
ASML NETHERLANDS BV0 citations59
US7978308B2Jul 12, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations57
US10481502B2Nov 19, 2019
Object holder and lithographic apparatus
ASML NETHERLANDS BV0 citations51
US10705426B2Jul 7, 2020
Extraction body for lithographic apparatus
ASML NETHERLANDS BV0 citations48
US10656536B2May 19, 2020
Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations37
KUNNEN JOHAN GERTRUDIS CORNELIS
3 patentsUS8970822B2Mar 3, 2015
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
KUNNEN JOHAN GERTRUDIS CORNELIS8 citations82
US9280063B2Mar 8, 2016
Substrate table assembly, an immersion lithographic apparatus and a device manufacturing method
KUNNEN JOHAN GERTRUDIS CORNELIS3 citations71
US9897928B2Feb 20, 2018
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
KUNNEN JOHAN GERTRUDIS CORNELIS1 citations49