Inventor

SZILAGYI JOHN

US3 patents

⚠️ This page may combine multiple inventors who share the name “SZILAGYI JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA CORP

2 patents

US12033845B2Jul 9, 2024

Laser-sustained plasma source based on colliding liquid jets

KLA CORP2 citations69

US11844172B2Dec 12, 2023

System and method for vacuum ultraviolet lamp assisted ignition of oxygen-containing laser sustained plasma sources

KLA CORP0 citations59

KLA TENCOR CORP

1 patent

US10690589B2Jun 23, 2020

Laser sustained plasma light source with forced flow through natural convection

KLA TENCOR CORP8 citations81