Inventor
DEWIT JOHN G
US3 patents
Patents
3 patentsUS6427566B1Aug 6, 2002
Self-aligning cylindrical mandrel assembly and wafer preparation apparatus including the same
LAM RES CORP30 citations90
US6328640B1Dec 11, 2001
Wafer preparation apparatus including rotatable wafer preparation assemblies
LAM RES CORP23 citations90
US6368192B1Apr 9, 2002
Wafer preparation apparatus including variable height wafer drive assembly
LAM RES CORP16 citations82