Inventor

KENNARD MARK ALLEN

US3 patents

Patents

3 patents

US6669783B2Dec 30, 2003

High temperature electrostatic chuck

LAM RES CORP92 citations95

US6567258B2May 20, 2003

High temperature electrostatic chuck

LAM RES CORP17 citations90

US6377437B1Apr 23, 2002

High temperature electrostatic chuck

LAM RES CORP41 citations90