Inventor
FITRIANTO
JP4 patents
Patents
4 patentsUS8828183B2Sep 9, 2014
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD30 citations90
US9859136B2Jan 2, 2018
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD5 citations82
US11437252B2Sep 6, 2022
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD2 citations71
US10707102B2Jul 7, 2020
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations50