P

Inventor

TOKUNAGA YOICHI

JP13 patents
⚠️ This page may combine multiple inventors who share the name “TOKUNAGA YOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

9 patents
US8828183B2Sep 9, 2014

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD30 citations90
US9859136B2Jan 2, 2018

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD5 citations82
US11574827B2Feb 7, 2023

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD4 citations74
US9716002B2Jul 25, 2017

Substrate cleaning method

TOKYO ELECTRON LTD3 citations72
US11437252B2Sep 6, 2022

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD2 citations71
US9120120B2Sep 1, 2015

Cleaning apparatus and cleaning method, coater/developer and coating and developing method, and computer readable storing medium

TOKYO ELECTRON LTD4 citations70
US11244820B2Feb 8, 2022

Substrate processing apparatus, substrate processing method, and storage medium

TOKYO ELECTRON LTD0 citations50
US10707102B2Jul 7, 2020

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD0 citations50
US10851468B2Dec 1, 2020

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD0 citations41

HITACHI LTD

2 patents
US4210942AJul 1, 1980

Video signal play-back circuit

HITACHI LTD9 citations74
US4268873AMay 19, 1981

Servo circuit for rotary heads of a video tape recorder

HITACHI LTD3 citations57

TAKIGUCHI YASUSHI

1 patent
US8578953B2Nov 12, 2013

Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage medium

TAKIGUCHI YASUSHI17 citations90

YAMAMOTO TARO

1 patent
US8851092B2Oct 7, 2014

Cleaning apparatus and cleaning method, coater/developer and coating and developing method, and computer readable storing medium

YAMAMOTO TARO5 citations70