Inventor
BELLO ABNER
US10 patents
Patents
10 patentsUS8889500B1Nov 18, 2014
Methods of forming stressed fin channel structures for FinFET semiconductor devices
GLOBALFOUNDRIES INC28 citations92
US8975142B2Mar 10, 2015
FinFET channel stress using tungsten contacts in raised epitaxial source and drain
GLOBALFOUNDRIES INC14 citations83
US9419137B1Aug 16, 2016
Stress memorization film and oxide isolation in fins
GLOBALFOUNDRIES INC7 citations79
US10343253B2Jul 9, 2019
Methods and systems for chemical mechanical planarization endpoint detection using an alternating current reference signal
GLOBALFOUNDRIES INC2 citations70
US9911634B2Mar 6, 2018
Self-contained metrology wafer carrier systems
GLOBALFOUNDRIES INC1 citations59
US10931143B2Feb 23, 2021
Rechargeable wafer carrier systems
GLOBALFOUNDRIES INC0 citations51
US10818528B2Oct 27, 2020
Self-contained metrology wafer carrier systems
GLOBALFOUNDRIES INC0 citations49
US10242895B2Mar 26, 2019
Self-contained metrology wafer carrier systems
GLOBALFOUNDRIES INC0 citations49
US9117930B2Aug 25, 2015
Methods of forming stressed fin channel structures for FinFET semiconductor devices
GLOBALFOUNDRIES INC0 citations41
US9281249B2Mar 8, 2016
Decoupling measurement of layer thicknesses of a plurality of layers of a circuit structure
GLOBALFOUNDRIES INC0 citations40