Inventor
BEEG THOMAS
US3 patents
Patents
3 patentsUS9911634B2Mar 6, 2018
Self-contained metrology wafer carrier systems
GLOBALFOUNDRIES INC1 citations59
US10818528B2Oct 27, 2020
Self-contained metrology wafer carrier systems
GLOBALFOUNDRIES INC0 citations49
US10242895B2Mar 26, 2019
Self-contained metrology wafer carrier systems
GLOBALFOUNDRIES INC0 citations49