Inventor

GREER FRANK

US31 patents

⚠️ This page may combine multiple inventors who share the name “GREER FRANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GREER FRANK

INTERMOLECULAR INC

Superconducting junctions

Surface preparation with remote plasma

Catalytic growth of Josephson junction tunnel barrier

Gate stacks and ohmic contacts for SiC devices

Plasma cleaning of superconducting layers

Atomic layer deposition of metal-oxide tunnel barriers using optimized oxidants

Plasma treatment of low-K surface to improve barrier deposition

Plasma densification of dielectrics for improved dielectric loss tangent

Nucleation interface for high-k layer on germanium

Methods for forming high-k dielectrics containing hafnium and zirconium using atomic layer deposition

Low temperature deposition of low loss dielectric layers in superconducting circuits

Combinatorially variable etching of stacks including two dissimilar materials for etch pit density inspection

Reduction of native oxides by annealing in reducing gas or plasma

Gate stacks including TaXSiYO for MOSFETS

Multipurpose combinatorial vapor phase deposition chamber

NOVELLUS SYSTEMS INC

Method of reducing plasma stabilization time in a cyclic deposition process

Methods and apparatus for engineering an interface between a diffusion barrier layer and a seed layer

Method of increasing the reactivity of a precursor in a cyclic deposition process

Methods for stripping photoresist and/or cleaning metal regions

HOENK MICHAEL E

Atomic layer deposition of high performance anti reflection coatings on delta-doped CCDs

Atomic layer deposition of chemical passivation layers and high performance anti-reflection coatings on back-illuminated detectors

Delta-doping at wafer level for high throughput, high yield fabrication of silicon imaging arrays

GREER FRANK

Atomically precise surface engineering for producing imagers

Methods to fabricate and improve stand-alone and integrated filters

CALIFORNIA INST OF TECHN

Atomically precise surface engineering for producing imagers

Micro-emitters for electrospray systems

CIRRUS LOGIC INC

User interface system methods and computer program products for multi-function consumer entertainment appliances

CHEN DAVID

Methods for stripping photoresist and/or cleaning metal regions

HEREDIA RAFAEL

System and method for administration and operation of one or more mobile electronic communications devices

UNIV SOUTHERN CALIFORNIA

Composite substrate for fabricating III-V photodetector arrays

PARK KIE-JIN

Method of improving film non-uniformity and throughput