Inventor
WAGENLEITNER THOMAS
AT46 patents
⚠️ This page may combine multiple inventors who share the name “WAGENLEITNER THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EV GROUP E THALLNER GMBH
39 patentsUS10109487B2Oct 23, 2018
Method for bonding substrates
EV GROUP E THALLNER GMBH10 citations92
US11282706B2Mar 22, 2022
Device and method for bonding of substrates
EV GROUP E THALLNER GMBH7 citations85
US10279575B2May 7, 2019
Device and method for bonding substrates
EV GROUP E THALLNER GMBH9 citations84
US9851645B2Dec 26, 2017
Device and method for aligning substrates
EV GROUP E THALLNER GMBH8 citations84
US10636662B2Apr 28, 2020
Device and method for bonding of substrates
EV GROUP E THALLNER GMBH3 citations83
US10325798B2Jun 18, 2019
Accommodating device for retaining wafers
EV GROUP E THALLNER GMBH7 citations83
US10943807B2Mar 9, 2021
Method and device for alignment of substrates
EV GROUP E THALLNER GMBH7 citations82
US10692747B2Jun 23, 2020
Method and device for alignment of substrates
EV GROUP E THALLNER GMBH6 citations82
US11121091B2Sep 14, 2021
Method for arranging two substrates
EV GROUP E THALLNER GMBH3 citations73
US11059280B2Jul 13, 2021
Device and method for bonding substrates
EV GROUP E THALLNER GMBH2 citations73
US11527410B2Dec 13, 2022
Device and method for bonding of substrates
EV GROUP E THALLNER GMBH1 citations72
US11355374B2Jun 7, 2022
Accommodating device for retaining wafers
EV GROUP E THALLNER GMBH2 citations72
US11251045B2Feb 15, 2022
Device and method for bonding of substrates
EV GROUP E THALLNER GMBH1 citations72
US10886156B2Jan 5, 2021
Accomodating device for retaining wafers
EV GROUP E THALLNER GMBH3 citations72
US10861699B2Dec 8, 2020
Device and method for bonding of substrates
EV GROUP E THALLNER GMBH1 citations72
US10748770B2Aug 18, 2020
Device and method for bonding of substrates
EV GROUP E THALLNER GMBH1 citations72
US10504730B2Dec 10, 2019
Device and method for bonding of substates
EV GROUP E THALLNER GMBH1 citations72
US11315901B2Apr 26, 2022
Method for bonding substrates
EV GROUP E THALLNER GMBH3 citations71
US11101132B2Aug 24, 2021
Method and device for bonding of substrates
EV GROUP E THALLNER GMBH1 citations71
US10991609B2Apr 27, 2021
Method and substrate holder for the controlled bonding of substrates
EV GROUP E THALLNER GMBH2 citations71
US10755929B2Aug 25, 2020
Method and device for bonding of substrates
EV GROUP E THALLNER GMBH3 citations71
US11315813B2Apr 26, 2022
Substrate holder and method for bonding two substrates
EV GROUP E THALLNER GMBH2 citations68
US10954122B2Mar 23, 2021
Method for bonding of at least three substrates
EV GROUP E THALLNER GMBH2 citations68
US12131907B2Oct 29, 2024
Device and method for bonding of substrates
EV GROUP E THALLNER GMBH0 citations62
US11955339B2Apr 9, 2024
Device and method for bonding of substrates
EV GROUP E THALLNER GMBH0 citations62
US11697281B2Jul 11, 2023
Device and method for bonding substrates
EV GROUP E THALLNER GMBH0 citations62
US11020950B2Jun 1, 2021
Device and method for bonding substrates
EV GROUP E THALLNER GMBH0 citations62
US11020951B2Jun 1, 2021
Device and method for bonding substrates
EV GROUP E THALLNER GMBH0 citations62
US11020953B2Jun 1, 2021
Device and method for bonding substrates
EV GROUP E THALLNER GMBH0 citations62
US11020952B2Jun 1, 2021
Device and method for bonding substrates
EV GROUP E THALLNER GMBH0 citations62
US12412865B2Sep 9, 2025
Apparatus and method for bonding substrates
EV GROUP E THALLNER GMBH0 citations61
US11756818B2Sep 12, 2023
Accommodating device for retaining wafers
EV GROUP E THALLNER GMBH0 citations61
US11742205B2Aug 29, 2023
Method and device for bonding of substrates
EV GROUP E THALLNER GMBH0 citations61
US11488851B2Nov 1, 2022
Method and device for alignment of substrates
EV GROUP E THALLNER GMBH0 citations60
US11680792B2Jun 20, 2023
Incoming runout measurement method
EV GROUP E THALLNER GMBH0 citations53
US10410896B2Sep 10, 2019
Apparatus and method for ascertaining orientation errors
EV GROUP E THALLNER GMBH0 citations52
US10755930B2Aug 25, 2020
Method and device for bonding of substrates
EV GROUP E THALLNER GMBH0 citations51
US12510834B2Dec 30, 2025
Method and device for the alignment of substrates
EV GROUP E THALLNER GMBH0 citations45
US10707059B2Jul 7, 2020
Method and device for plasma treatment of substrates
EV GROUP E THALLNER GMBH0 citations32
WAGENLEITNER THOMAS
4 patentsUS9613840B2Apr 4, 2017
Apparatus and method for bonding substrates
WAGENLEITNER THOMAS18 citations83
US10134622B2Nov 20, 2018
Apparatus and method for ascertaining orientation errors
WAGENLEITNER THOMAS2 citations72
US9595094B2Mar 14, 2017
Measuring form changes of a substrate
WAGENLEITNER THOMAS2 citations72
US9464884B2Oct 11, 2016
Method for determining the position of a rotation axis
WAGENLEITNER THOMAS1 citations51