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Inventor
CHOU KUEI-LUNG
TW
2 patents
Patents
2 patents
US5629237A
May 13, 1997
Taper etching without re-entrance profile
TAIWAN SEMICONDUCTOR MFG
53 citations
89
US5669508A
Sep 23, 1997
Pod carrier function expansion by adding a fixture
TAIWAN SEMICONDUCTOR MFG
7 citations
68