Inventor
BAKEMAN MICHAEL S
US15 patents
⚠️ This page may combine multiple inventors who share the name “BAKEMAN MICHAEL S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
14 patentsUS10324050B2Jun 18, 2019
Measurement system optimization for X-ray based metrology
KLA TENCOR CORP32 citations94
US10013518B2Jul 3, 2018
Model building and analysis engine for combined X-ray and optical metrology
KLA TENCOR CORP29 citations94
US9885962B2Feb 6, 2018
Methods and apparatus for measuring semiconductor device overlay using X-ray metrology
KLA TENCOR CORP35 citations94
US9826614B1Nov 21, 2017
Compac X-ray source for semiconductor metrology
KLA TENCOR CORP22 citations94
US9778213B2Oct 3, 2017
Metrology tool with combined XRF and SAXS capabilities
KLA TENCOR CORP39 citations93
US9693439B1Jun 27, 2017
High brightness liquid droplet X-ray source for semiconductor metrology
KLA TENCOR CORP20 citations92
US9494535B2Nov 15, 2016
Scatterometry-based imaging and critical dimension metrology
KLA TENCOR CORP23 citations92
US9846132B2Dec 19, 2017
Small-angle scattering X-ray metrology systems and methods
KLA TENCOR CORP10 citations84
US10545104B2Jan 28, 2020
Computationally efficient X-ray based overlay measurement
KLA TENCOR CORP10 citations83
US10006865B1Jun 26, 2018
Confined illumination for small spot size metrology
KLA TENCOR CORP8 citations83
US9535018B2Jan 3, 2017
Combined x-ray and optical metrology
KLA TENCOR CORP7 citations83
US10012606B1Jul 3, 2018
X-ray based metrology with primary and secondary illumination sources
KLA TENCOR CORP8 citations82
US10801975B2Oct 13, 2020
Metrology tool with combined X-ray and optical scatterometers
KLA TENCOR CORP6 citations73
US9719932B1Aug 1, 2017
Confined illumination for small spot size metrology
KLA TENCOR CORP2 citations72