Inventor

LU GAU-MING

TW3 patents

⚠️ This page may combine multiple inventors who share the name “LU GAU-MING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

2 patents

US6887793B2May 3, 2005

Method for plasma etching a wafer after backside grinding

TAIWAN SEMICONDUCTOR MFG10 citations68

US6652666B2Nov 25, 2003

Wet dip method for photoresist and polymer stripping without buffer treatment step

TAIWAN SEMICONDUCTOR MFG4 citations56

(unassigned)

1 patent

US6740471B1May 25, 2004

Photoresist adhesion improvement on metal layer after photoresist rework by extra N2O treatment

8 citations68