Inventor
ROZENZON YAN
US20 patents
⚠️ This page may combine multiple inventors who share the name “ROZENZON YAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
14 patentsUS6916399B1Jul 12, 2005
Temperature controlled window with a fluid supply system
APPLIED MATERIALS INC168 citations96
US5484486AJan 16, 1996
Quick release process kit
APPLIED MATERIALS INC23 citations90
US5693179ADec 2, 1997
Contaminant reduction improvements for plasma etch chambers
APPLIED MATERIALS INC18 citations89
US10163606B2Dec 25, 2018
Plasma reactor with highly symmetrical four-fold gas injection
APPLIED MATERIALS INC11 citations83
US10008368B2Jun 26, 2018
Multi-zone gas injection assembly with azimuthal and radial distribution control
APPLIED MATERIALS INC10 citations83
US5714036AFeb 3, 1998
Chlorine reduction module
APPLIED MATERIALS INC6 citations73
US11728141B2Aug 15, 2023
Gas hub for plasma reactor
APPLIED MATERIALS INC2 citations72
US11139150B2Oct 5, 2021
Nozzle for multi-zone gas injection assembly
APPLIED MATERIALS INC2 citations72
US5716484AFeb 10, 1998
Contaminant reduction improvements for plasma etch chambers
APPLIED MATERIALS INC8 citations71
US11251067B2Feb 15, 2022
Pedestal lift for semiconductor processing chambers
APPLIED MATERIALS INC2 citations68
US11244811B2Feb 8, 2022
Plasma reactor with highly symmetrical four-fold gas injection
APPLIED MATERIALS INC1 citations61
US10861681B2Dec 8, 2020
Apparatus for collection and subsequent reaction of liquid and solid effluent into gaseous effluent
APPLIED MATERIALS INC1 citations58
US10410841B2Sep 10, 2019
Side gas injection kit for multi-zone gas injection assembly
APPLIED MATERIALS INC0 citations51
US11114285B2Sep 7, 2021
Apparatus for exhaust cooling
APPLIED MATERIALS INC0 citations48
POPPE STEVE
3 patentsUS8652259B2Feb 18, 2014
Scalable, high-throughput, multi-chamber epitaxial reactor for silicon deposition
POPPE STEVE5 citations68
US8968473B2Mar 3, 2015
Stackable multi-port gas nozzles
POPPE STEVE0 citations38
US8845809B2Sep 30, 2014
Scalable, high-throughput, multi-chamber epitaxial reactor for silicon deposition
POPPE STEVE0 citations36