Inventor
TANTIWONG KYLE
US16 patents
⚠️ This page may combine multiple inventors who share the name “TANTIWONG KYLE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
15 patentsUS10163606B2Dec 25, 2018
Plasma reactor with highly symmetrical four-fold gas injection
APPLIED MATERIALS INC11 citations83
US10008368B2Jun 26, 2018
Multi-zone gas injection assembly with azimuthal and radial distribution control
APPLIED MATERIALS INC10 citations83
US9536710B2Jan 3, 2017
Tunable gas delivery assembly with internal diffuser and angular injection
APPLIED MATERIALS INC7 citations83
US9659803B2May 23, 2017
Electrostatic chuck with concentric cooling base
APPLIED MATERIALS INC4 citations73
US11728141B2Aug 15, 2023
Gas hub for plasma reactor
APPLIED MATERIALS INC2 citations72
US11139150B2Oct 5, 2021
Nozzle for multi-zone gas injection assembly
APPLIED MATERIALS INC2 citations72
US10332772B2Jun 25, 2019
Multi-zone heated ESC with independent edge zones
APPLIED MATERIALS INC4 citations72
US11119051B2Sep 14, 2021
Particle detection for substrate processing
APPLIED MATERIALS INC0 citations62
US11244811B2Feb 8, 2022
Plasma reactor with highly symmetrical four-fold gas injection
APPLIED MATERIALS INC1 citations61
US10923371B2Feb 16, 2021
Metrology system for substrate deformation measurement
APPLIED MATERIALS INC0 citations52
US10510624B2Dec 17, 2019
Metrology systems with multiple derivative modules for substrate stress and deformation measurement
APPLIED MATERIALS INC0 citations52
US10845317B2Nov 24, 2020
Particle detection for substrate processing
APPLIED MATERIALS INC0 citations51
US10410841B2Sep 10, 2019
Side gas injection kit for multi-zone gas injection assembly
APPLIED MATERIALS INC0 citations51
US12564015B2Feb 24, 2026
Integrated inspection for enhanced hybrid bonding yield in advanced semiconductor packaging manufacturing
APPLIED MATERIALS INC0 citations50
US10553398B2Feb 4, 2020
Power deposition control in inductively coupled plasma (ICP) reactors
APPLIED MATERIALS INC0 citations41