Inventor
KNYAZIK VLADIMIR
US23 patents
Patents
23 patentsUS10163606B2Dec 25, 2018
Plasma reactor with highly symmetrical four-fold gas injection
APPLIED MATERIALS INC11 citations83
US10008368B2Jun 26, 2018
Multi-zone gas injection assembly with azimuthal and radial distribution control
APPLIED MATERIALS INC10 citations83
US9911579B2Mar 6, 2018
Showerhead having a detachable high resistivity gas distribution plate
APPLIED MATERIALS INC6 citations83
US9610591B2Apr 4, 2017
Showerhead having a detachable gas distribution plate
APPLIED MATERIALS INC8 citations83
US9536710B2Jan 3, 2017
Tunable gas delivery assembly with internal diffuser and angular injection
APPLIED MATERIALS INC7 citations83
US11189502B2Nov 30, 2021
Showerhead with interlaced gas feed and removal and methods of use
APPLIED MATERIALS INC5 citations73
US11728141B2Aug 15, 2023
Gas hub for plasma reactor
APPLIED MATERIALS INC2 citations72
US11139150B2Oct 5, 2021
Nozzle for multi-zone gas injection assembly
APPLIED MATERIALS INC2 citations72
US11130142B2Sep 28, 2021
Showerhead having a detachable gas distribution plate
APPLIED MATERIALS INC1 citations72
US10790120B2Sep 29, 2020
Showerhead having a detachable high resistivity gas distribution plate
APPLIED MATERIALS INC1 citations72
US10625277B2Apr 21, 2020
Showerhead having a detachable gas distribution plate
APPLIED MATERIALS INC2 citations72
US10607816B2Mar 31, 2020
Showerhead having a detachable high resistivity gas distribution plate
APPLIED MATERIALS INC3 citations72
US10332772B2Jun 25, 2019
Multi-zone heated ESC with independent edge zones
APPLIED MATERIALS INC4 citations72
US11881384B2Jan 23, 2024
Monolithic modular microwave source with integrated process gas distribution
APPLIED MATERIALS INC2 citations71
US10586718B2Mar 10, 2020
Cooling base with spiral channels for ESC
APPLIED MATERIALS INC1 citations62
US12191118B2Jan 7, 2025
Monolithic modular microwave source with integrated process gas distribution
APPLIED MATERIALS INC0 citations61
US12033881B2Jul 9, 2024
Reduced localized force in electrostatic chucking
APPLIED MATERIALS INC0 citations61
US11244811B2Feb 8, 2022
Plasma reactor with highly symmetrical four-fold gas injection
APPLIED MATERIALS INC1 citations61
US9472378B2Oct 18, 2016
Multiple zone coil antenna with plural radial lobes
APPLIED MATERIALS INC2 citations60
US10410841B2Sep 10, 2019
Side gas injection kit for multi-zone gas injection assembly
APPLIED MATERIALS INC0 citations51
US9945033B2Apr 17, 2018
High efficiency inductively coupled plasma source with customized RF shield for plasma profile control
APPLIED MATERIALS INC0 citations51
US9312104B2Apr 12, 2016
Coil antenna with plural radial lobes
APPLIED MATERIALS INC0 citations49
US10553398B2Feb 4, 2020
Power deposition control in inductively coupled plasma (ICP) reactors
APPLIED MATERIALS INC0 citations41