Inventor
KEATING BOJENNA
US6 patents
Patents
6 patentsUS10163606B2Dec 25, 2018
Plasma reactor with highly symmetrical four-fold gas injection
APPLIED MATERIALS INC11 citations83
US10008368B2Jun 26, 2018
Multi-zone gas injection assembly with azimuthal and radial distribution control
APPLIED MATERIALS INC10 citations83
US11728141B2Aug 15, 2023
Gas hub for plasma reactor
APPLIED MATERIALS INC2 citations72
US11139150B2Oct 5, 2021
Nozzle for multi-zone gas injection assembly
APPLIED MATERIALS INC2 citations72
US11244811B2Feb 8, 2022
Plasma reactor with highly symmetrical four-fold gas injection
APPLIED MATERIALS INC1 citations61
US10410841B2Sep 10, 2019
Side gas injection kit for multi-zone gas injection assembly
APPLIED MATERIALS INC0 citations51