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Inventor
BRENNER MIKE
US
2 patents
Patents
2 patents
US6063696A
May 16, 2000
Method of reducing wafer particles after partial saw using a superhard protective coating
TEXAS INSTRUMENTS INC
67 citations
91
US5817569A
Oct 6, 1998
Method of reducing wafer particles after partial saw
TEXAS INSTRUMENTS INC
25 citations
89