Inventor
NONAKA SOHEI
JP2 patents
Patents
2 patentsUS10538059B2Jan 21, 2020
Sputtering target for forming protective film, and laminated wiring film
MITSUBISHI MATERIALS CORP0 citations43
US10060025B2Aug 28, 2018
Ag alloy sputtering target, method of manufacturing Ag alloy sputtering target, Ag alloy film, and method of forming Ag alloy film
MITSUBISHI MATERIALS CORP0 citations36