Inventor
FUJIMORI YOSHIHIKO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “FUJIMORI YOSHIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
5 patentsUS5046109ASep 3, 1991
Pattern inspection apparatus
NIKON CORP137 citations96
US4942619AJul 17, 1990
Pattern inspecting apparatus
NIKON CORP19 citations73
US4870693ASep 26, 1989
Mask inspecting apparatus
NIKON CORP8 citations69
US7907268B2Mar 15, 2011
Surface inspection method and surface inspection device
NIKON CORP4 citations61
US9322788B2Apr 26, 2016
Surface inspection apparatus, method for inspecting surface, exposure system, and method for producing semiconductor device
NIKON CORP0 citations48
FUKAZAWA KAZUHIKO
2 patentsUS10352875B2Jul 16, 2019
Inspection apparatus, inspection method, exposure method, and method for manufacturing semiconductor device
FUKAZAWA KAZUHIKO2 citations71
US9240356B2Jan 19, 2016
Surface inspection apparatus, method for inspecting surface, exposure system, and method for producing semiconductor device
FUKAZAWA KAZUHIKO1 citations58