Inventor
PARK JONGJU
KR11 patents
⚠️ This page may combine multiple inventors who share the name “PARK JONGJU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
8 patentsUS9703186B2Jul 11, 2017
Mask including pellicle, pellicle repairing apparatus, and substrate manufacturing equipment
SAMSUNG ELECTRONICS CO LTD7 citations81
US9466490B2Oct 11, 2016
Beam shapers, annealing systems employing the same, methods of heat treating substrates and methods of fabricating semiconductor devices
SAMSUNG ELECTRONICS CO LTD4 citations70
US11635371B2Apr 25, 2023
Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and method of fabricating EUV mask including the method
SAMSUNG ELECTRONICS CO LTD3 citations69
US11506968B2Nov 22, 2022
Method of annealing reflective photomask by using laser
SAMSUNG ELECTRONICS CO LTD3 citations69
US11934092B2Mar 19, 2024
Method of annealing reflective photomask by using laser
SAMSUNG ELECTRONICS CO LTD0 citations58
US11852583B2Dec 26, 2023
Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and method of fabricating EUV mask including the method
SAMSUNG ELECTRONICS CO LTD0 citations58
US12313979B2May 27, 2025
Correcting apparatus of extreme ultraviolet (EUV) photomask and correcting method of EUV photomask
SAMSUNG ELECTRONICS CO LTD0 citations55
US12259647B2Mar 25, 2025
Method of manufacturing extreme ultraviolet (EUV) photomask and method and apparatus for correcting EUV photomask
SAMSUNG ELECTRONICS CO LTD0 citations53