Inventor
CHIU HUAI-HSIEN
TW6 patents
Patents
6 patentsUS10692769B2Jun 23, 2020
Fin critical dimension loading optimization
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations82
US11004747B2May 11, 2021
Fin critical dimension loading optimization
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10529862B2Jan 7, 2020
Semiconductor device and method of forming semiconductor fin thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US11749679B2Sep 5, 2023
Integrated circuit structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11075199B2Jul 27, 2021
Method of forming semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10204905B2Feb 12, 2019
Semiconductor structure and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50