P

Inventor

ANDO ATSUSHI

JP79 patents
⚠️ This page may combine multiple inventors who share the name “ANDO ATSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA KK

14 patents
US5989759ANov 23, 1999

Pattern forming method using alignment from latent image or base pattern on substrate

TOSHIBA KK41 citations96
US6147355ANov 14, 2000

Pattern forming method

TOSHIBA KK22 citations93
US6495841B1Dec 17, 2002

Charged beam drawing apparatus

TOSHIBA KK30 citations92
US5994030ANov 30, 1999

Pattern-forming method and lithographic system

TOSHIBA KK23 citations92
US6940080B2Sep 6, 2005

Charged particle beam lithography system, lithography method using charged particle beam, method of controlling charged particle beam, and method of manufacturing semiconductor device

TOSHIBA KK12 citations84
US6633045B1Oct 14, 2003

Assembly part with wiring and for manufacturing system, method of manufacturing such assembly part, and semiconductor manufacturing system constituted using assembly part

TOSHIBA KK13 citations84
US7102147B2Sep 5, 2006

Charged particle beam exposure method and method for producing charged particle beam exposure data

TOSHIBA KK8 citations74
US7095023B2Aug 22, 2006

Charged particle beam apparatus, charged particle detection method, and method of manufacturing semiconductor device

TOSHIBA KK8 citations74
US6941008B2Sep 6, 2005

Pattern forming method

TOSHIBA KK7 citations74
US6718532B2Apr 6, 2004

Charged particle beam exposure system using aperture mask in semiconductor manufacture

TOSHIBA KK10 citations74
US5994007ANov 30, 1999

Pattern forming method utilizing first insulative and then conductive overlayer and underlayer

TOSHIBA KK9 citations74
US6093931AJul 25, 2000

Pattern-forming method and lithographic system

TOSHIBA KK11 citations73
US5843603ADec 1, 1998

Method of evaluating shaped beam of charged beam writer and method of forming pattern

TOSHIBA KK14 citations73
US7109501B2Sep 19, 2006

Charged particle beam lithography system, pattern drawing method, and method of manufacturing semiconductor device

TOSHIBA KK6 citations63

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

8 patents

NUFLARE TECHNOLOGY INC

8 patents

NIPPON TELEGRAPH & TELEPHONE

4 patents

TAKAYAMA HISASHI

3 patents

OLYMPUS CORP

2 patents

NISSHIN STEEL CO LTD

2 patents

FUJITSU FRONTECH LTD

2 patents

MELEC CO LTD

1 patent

JTEKT CORP

1 patent

KOBAYASHI TSUNE

1 patent

HASEGAWA HARUNARI

1 patent

TOYODA MACHINE WORKS LTD

1 patent

TOKYO ELECTRON LTD

1 patent

AGENCY IND SCIENCE TECHN

1 patent

Showing the top 50 of 79 patents by PatentIndex Score.