Inventor
TANI NAOYUKI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “TANI NAOYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NITTA CORP
2 patentsUS6666752B1Dec 23, 2003
Wafer retainer and method for attaching/detaching the wafer retainer to/from polishing machine base plate
NITTA CORP20 citations91
US6616520B1Sep 9, 2003
Polishing cloth and method for attaching/detaching the polishing cloth to/from polishing machine base plate
NITTA CORP30 citations91