Inventor
SUN XINGHUA
US24 patents
⚠️ This page may combine multiple inventors who share the name “SUN XINGHUA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS11515203B2Nov 29, 2022
Selective deposition of conductive cap for fully-aligned-via (FAV)
TOKYO ELECTRON LTD2 citations72
US11164781B2Nov 2, 2021
ALD (atomic layer deposition) liner for via profile control and related applications
TOKYO ELECTRON LTD2 citations72
US10304725B2May 28, 2019
Manufacturing methods to protect ULK materials from damage during etch processing to obtain desired features
TOKYO ELECTRON LTD2 citations72
US11121027B2Sep 14, 2021
High aspect ratio via etch using atomic layer deposition protection layer
TOKYO ELECTRON LTD4 citations71
US11127594B2Sep 21, 2021
Manufacturing methods for mandrel pull from spacers for multi-color patterning
TOKYO ELECTRON LTD0 citations62
US11742241B2Aug 29, 2023
ALD (atomic layer deposition) liner for via profile control and related applications
TOKYO ELECTRON LTD0 citations61
US11289325B2Mar 29, 2022
Radiation of substrates during processing and systems thereof
TOKYO ELECTRON LTD0 citations59
US11532517B2Dec 20, 2022
Localized etch stop layer
TOKYO ELECTRON LTD0 citations51
US11756790B2Sep 12, 2023
Method for patterning a dielectric layer
TOKYO ELECTRON LTD0 citations50
US10964587B2Mar 30, 2021
Atomic layer deposition for low-K trench protection during etch
TOKYO ELECTRON LTD0 citations50
US12451353B2Oct 21, 2025
Double hardmasks for self-aligned multi-patterning processes
TOKYO ELECTRON LTD0 citations45
SUZHOU LUXSHARE TECH CO LTD
5 patentsUS12531321B2Jan 20, 2026
Cavity filter
SUZHOU LUXSHARE TECH CO LTD0 citations62
US12412969B2Sep 9, 2025
Coaxial filter and communication radio frequency device
SUZHOU LUXSHARE TECH CO LTD0 citations59
US12212031B2Jan 28, 2025
Cavity filter
SUZHOU LUXSHARE TECH CO LTD0 citations48
US12531320B2Jan 20, 2026
Cavity filter
SUZHOU LUXSHARE TECH CO LTD0 citations47
US12451574B2Oct 21, 2025
Cavity filter
SUZHOU LUXSHARE TECH CO LTD0 citations44
ANTICANCER INC
3 patentsUS7329516B2Feb 12, 2008
Methods for increasing protein polyethylene glycol (PEG) conjugation
ANTICANCER INC15 citations91
US7799549B2Sep 21, 2010
Methods for increasing protein polyethylene glycol (PEG) conjugation
ANTICANCER INC3 citations61
US7264819B2Sep 4, 2007
Lyase treatment for P. carinii
ANTICANCER INC0 citations51