Inventor

ZHANG HENAN

US24 patents

⚠️ This page may combine multiple inventors who share the name “ZHANG HENAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZHANG HENAN

TOKYO ELECTRON LTD

Forming a semiconductor feature using atomic layer etch

Wet etch process and method to control fin height and channel area in a fin field effect transistor (FinFET)

Methods for planarizing a substrate using a combined wet etch and chemical mechanical polishing (CMP) process

Radiation of substrates during processing and systems thereof

Methods to provide uniform wet etching of material within high aspect ratio features provided on a patterned substrate

Wet etch process and method to provide uniform etching of material formed within features having different critical dimension (CD)

Localized etch stop layer

Method for filling recessed features in semiconductor devices with a low-resistivity metal

Fabricating three-dimensional semiconductor structures

Wet etch process and methods to form air gaps between metal interconnects

Methods to prevent surface charge induced cd-dependent etching of material formed within features on a patterned substrate

Sacrificial capping layer for gate protection

BEIJING BAIDU NETCOM SCI & TECH CO LTD

Method and apparatus for generating face image

Method and apparatus for generating virtual avatar

Meme generation method, electronic device and storage medium

Satellite image processing method, network training method, related devices and electronic device

Method and apparatus for processing video frame

Cartoonlization processing method for image, electronic device, and storage medium

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD

Heating device and heating chamber

Loading apparatus and physical vapor deposition apparatus

Deposition apparatus and physical vapor deposition chamber

Sputtering method

Gas phase etching device and gas phase etching apparatus

BEIJING BAIDU NETCOM SCI & TEC

Super-resolution video reconstruction method, device, apparatus and computer-readable storage medium