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Inventor
NATARAJAN ANITA
US
3 patents
⚠️ This page may combine multiple inventors who share the name “NATARAJAN ANITA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV CLARKSON
2 patents
US7723234B2
May 25, 2010
Method for selective CMP of polysilicon
UNIV CLARKSON
6 citations
57
US7629258B2
Dec 8, 2009
Method for one-to-one polishing of silicon nitride and silicon oxide
UNIV CLARKSON
0 citations
48
NATARAJAN ANITA
1 patent
US8438001B2
May 7, 2013
Method and apparatus for improving noise analysis performance
NATARAJAN ANITA
22 citations
86