Inventor
TOSHIMORI Yuto
JP3 patents
Patents
3 patentsUS10971695B2Apr 6, 2021
Multilayer reflection electrode film, multilayer reflection electrode pattern, and method of forming multilayer reflection electrode pattern
MITSUBISHI MATERIALS CORP0 citations56
US10577687B2Mar 3, 2020
Ag alloy sputtering target and Ag alloy film manufacturing method
MITSUBISHI MATERIALS CORP0 citations46
US10060025B2Aug 28, 2018
Ag alloy sputtering target, method of manufacturing Ag alloy sputtering target, Ag alloy film, and method of forming Ag alloy film
MITSUBISHI MATERIALS CORP0 citations36