Inventor
CHAE HEE YEOP
KR3 patents
⚠️ This page may combine multiple inventors who share the name “CHAE HEE YEOP”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
2 patentsUS7300597B2Nov 27, 2007
Selective etch process of a sacrificial light absorbing material (SLAM) over a dielectric material
APPLIED MATERIALS INC18 citations91
US7309448B2Dec 18, 2007
Selective etch process of a sacrificial light absorbing material (SLAM) over a dielectric material
APPLIED MATERIALS INC10 citations82