Inventor

STOETEN JAN

NL2 patents

Patents

2 patents

US7649635B2Jan 19, 2010

Method for determining a map, device manufacturing method, and lithographic apparatus

ASML NETHERLANDS BV2 citations55

US7292351B2Nov 6, 2007

Method for determining a map, device manufacturing method, and lithographic apparatus

ASML NETHERLANDS BV4 citations54