Inventor
KANAGAWA KOUZOU
JP12 patents
Patents
12 patentsUS6736556B2May 18, 2004
Substrate processing apparatus
TOKYO ELECTRON LTD24 citations90
US6332724B1Dec 25, 2001
Substrate processing apparatus
TOKYO ELECTRON LTD24 citations90
US11978644B2May 7, 2024
Substrate processing system and substrate processing method
TOKYO ELECTRON LTD2 citations71
US11430675B2Aug 30, 2022
Substrate processing apparatus and processing liquid reuse method
TOKYO ELECTRON LTD1 citations62
US12525465B2Jan 13, 2026
Substrate processing system and substrate processing method
TOKYO ELECTRON LTD0 citations60
US12183613B2Dec 31, 2024
Substrate processing system and substrate processing method
TOKYO ELECTRON LTD1 citations60
US11469114B2Oct 11, 2022
Substrate processing system and substrate processing method
TOKYO ELECTRON LTD0 citations60
US12042815B2Jul 23, 2024
Substrate processing apparatus for supplying gas of water repellent agent and substrate processing method
TOKYO ELECTRON LTD0 citations51
US11476130B2Oct 18, 2022
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD0 citations51
US12087599B2Sep 10, 2024
Substrate processing apparatus and apparatus cleaning method
TOKYO ELECTRON LTD0 citations50
US11745213B2Sep 5, 2023
Substrate processing apparatus and apparatus cleaning method
TOKYO ELECTRON LTD0 citations50
US11615971B2Mar 28, 2023
Substrate processing apparatus and processing liquid concentration method
TOKYO ELECTRON LTD0 citations48