Inventor
TSURUSAKI KOTARO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “TSURUSAKI KOTARO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS6247479B1Jun 19, 2001
Washing/drying process apparatus and washing/drying process method
TOKYO ELECTRON LTD165 citations98
US7581335B2Sep 1, 2009
Substrate drying processing apparatus, method, and program recording medium
TOKYO ELECTRON LTD18 citations81
US11978644B2May 7, 2024
Substrate processing system and substrate processing method
TOKYO ELECTRON LTD2 citations71
US11404294B2Aug 2, 2022
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD0 citations62
US12525465B2Jan 13, 2026
Substrate processing system and substrate processing method
TOKYO ELECTRON LTD0 citations60
US12183613B2Dec 31, 2024
Substrate processing system and substrate processing method
TOKYO ELECTRON LTD1 citations60
US11469114B2Oct 11, 2022
Substrate processing system and substrate processing method
TOKYO ELECTRON LTD0 citations60
US7836900B2Nov 23, 2010
Substrate processing system, substrate processing method, recording medium and software
TOKYO ELECTRON LTD1 citations52
US12042815B2Jul 23, 2024
Substrate processing apparatus for supplying gas of water repellent agent and substrate processing method
TOKYO ELECTRON LTD0 citations51
US11476130B2Oct 18, 2022
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD0 citations51
US11615971B2Mar 28, 2023
Substrate processing apparatus and processing liquid concentration method
TOKYO ELECTRON LTD0 citations48