P

Inventor

KAI YOSHIHIRO

JP42 patents
⚠️ This page may combine multiple inventors who share the name “KAI YOSHIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

15 patents
US11574827B2Feb 7, 2023

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD4 citations74
US10700166B2Jun 30, 2020

Nozzle cleaning device, nozzle cleaning method, and substrate processing apparatus

TOKYO ELECTRON LTD4 citations73
US11978644B2May 7, 2024

Substrate processing system and substrate processing method

TOKYO ELECTRON LTD2 citations71
US9387520B2Jul 12, 2016

Liquid processing apparatus and cleaning method

TOKYO ELECTRON LTD4 citations69
US11862486B2Jan 2, 2024

Substrate liquid processing apparatus, substrate liquid processing method and recording medium

TOKYO ELECTRON LTD0 citations62
US12525465B2Jan 13, 2026

Substrate processing system and substrate processing method

TOKYO ELECTRON LTD0 citations60
US12183613B2Dec 31, 2024

Substrate processing system and substrate processing method

TOKYO ELECTRON LTD1 citations60
US11469114B2Oct 11, 2022

Substrate processing system and substrate processing method

TOKYO ELECTRON LTD0 citations60
US11742223B2Aug 29, 2023

Substrate processing apparatus

TOKYO ELECTRON LTD0 citations52
US10770316B2Sep 8, 2020

Substrate liquid processing apparatus, substrate liquid processing method and recording medium

TOKYO ELECTRON LTD0 citations51
US11887871B2Jan 30, 2024

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD0 citations47
US10851468B2Dec 1, 2020

Substrate processing apparatus and substrate processing method

TOKYO ELECTRON LTD0 citations41
US9764345B2Sep 19, 2017

Substrate processing apparatus and nozzle cleaning method

TOKYO ELECTRON LTD0 citations41
US10062586B2Aug 28, 2018

Chemical fluid processing apparatus and chemical fluid processing method

TOKYO ELECTRON LTD0 citations39
US9842751B2Dec 12, 2017

Substrate liquid processing apparatus

TOKYO ELECTRON LTD0 citations36

NISSHA PRINTING

5 patents

SUZUKI TAKAHIRO

4 patents

KAI YOSHIHIRO

3 patents

NISHIKAWA KAZUHIRO

2 patents

HIGASHIJIMA JIRO

2 patents

HASHIMOTO TAKAO

2 patents

SUETOMI YOSHIKO

2 patents

ENDO YUKO

1 patent

SHIBATA JUNICHI

1 patent

SHIMIZU JUN

1 patent

TAKAI YUICHIRO

1 patent

YAMADA YOUHEI

1 patent

HOSHINO HIROYUKI

1 patent

SAKATA YOSHIHIRO

1 patent