Inventor
ANGLIN KEVIN
US13 patents
⚠️ This page may combine multiple inventors who share the name “ANGLIN KEVIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
11 patentsUS10879055B2Dec 29, 2020
Techniques, system and apparatus for selective deposition of a layer using angled ions
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC12 citations84
US10222202B2Mar 5, 2019
Three dimensional structure fabrication control using novel processing system
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations72
US10522330B2Dec 31, 2019
In-situ plasma cleaning of process chamber components
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3 citations71
US10410844B2Sep 10, 2019
RF clean system for electrostatic elements
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations71
US10553448B2Feb 4, 2020
Techniques for processing a polycrystalline layer using an angled ion beam
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations68
US11495434B2Nov 8, 2022
In-situ plasma cleaning of process chamber components
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations61
US11037758B2Jun 15, 2021
In-situ plasma cleaning of process chamber components
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations61
US10269663B2Apr 23, 2019
Critical dimensions variance compensation
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations61
US11053580B2Jul 6, 2021
Techniques for selective deposition using angled ions
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations59
US10002764B1Jun 19, 2018
Sputter etch material selectivity
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations51
US10847372B2Nov 24, 2020
Workpiece processing technique
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations39