Inventor
DOWNEY RYAN
US3 patents
Patents
3 patentsUS10522330B2Dec 31, 2019
In-situ plasma cleaning of process chamber components
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3 citations71
US11495434B2Nov 8, 2022
In-situ plasma cleaning of process chamber components
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations61
US11037758B2Jun 15, 2021
In-situ plasma cleaning of process chamber components
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations61