Inventor

SCHEUER JAY T

US21 patents

⚠️ This page may combine multiple inventors who share the name “SCHEUER JAY T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SCHEUER JAY T

APPLIED MATERIALS INC

Ion source with single-slot tubular cathode

Device to control uniformity of extracted ion beam

Variable thickness ion source extraction plate

Electrostatic filter providing reduced particle generation

Single-slot tubular cathode

Ion source with single-slot tubular cathode

Particle yield via beam-line pressure control

Mismatched optics for angular control of extracted ion beam

Cylindrical shaped arc chamber for indirectly heated cathode ion source

Systems and methods for optimizing full horizontal scanned beam distance

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Apparatus and method for contamination control in ion beam apparatus

Liquid immersion doping

Apparatus and method for in-situ cleaning in ion beam apparatus

In-situ plasma cleaning of process chamber components

RF clean system for electrostatic elements

In-situ plasma cleaning of process chamber components

In-situ plasma cleaning of process chamber components

VARIAN SEMICONDUCTOR EQUIPMENT

Wafer platen equipped with electrostatic clamp, wafer backside gas cooling, and high voltage operation capability for plasma doping

Adjustable conductance limiting aperture for ion implanters

Monitoring plasma ion implantation systems for fault detection and process control

LOW RUSSELL J

Flexible ion source