Inventor

HOLBER WILLIAM M

US38 patents

⚠️ This page may combine multiple inventors who share the name “HOLBER WILLIAM M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HOLBER WILLIAM M

APPLIED SCIENCE & TECH INC

Toroidal low-field reactive gas source

Toroidal low-field reactive gas source

Integrated plasma chamber and inductively-coupled toroidal plasma source

RF power supply with integrated matching network

Toroidal low-field reactive gas source

Inductively-coupled toroidal plasma source

Toroidal low-field reactive gas source

Toroidal low-field reactive gas source

Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel

Microwave plasma deposition source and method of filling high aspect-ratio features on a substrate

Toroidal low-field reactive gas source

Microwave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tube

Fluid-cooled dielectric window for a plasma system

MKS INSTR INC

Radio frequency power delivery system

Toroidal low-field reactive gas source

Inductively-coupled torodial plasma source

Method and apparatus for processing metal bearing gases

Inductively-coupled toroidal plasma source

Chemical ionization reaction or proton transfer reaction mass spectrometry with a quadrupole mass spectrometer

Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel

Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel

Chemical ionization reaction or proton transfer reaction mass spectrometry

Chemical ionization reaction or proton transfer reaction mass spectrometry with a time-of-flight mass spectrometer

Method and apparatus for fluorine generation and recirculation

IBM

Etching of silicon dioxide selectively to silicon nitride and polysilicon

Method and apparatus for filing high aspect patterns with metal

Multi-wavelength optical thermometry

Scanned electron cyclotron resonance plasma source

HOLBER WILLIAM M

Method and apparatus for processing metal bearing gases

Method and apparatus for processing metal bearing gases

Laser-heated infrared source

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

In-situ plasma cleaning of process chamber components

In-situ plasma cleaning of process chamber components

In-situ plasma cleaning of process chamber components

NAGARKATTI SIDDHARTH P

Radio frequency power delivery system

SMITH DONALD K

Laser-driven light source

ROBINSON TIMOTHY ROGER

Chemical ionization reaction or proton transfer reaction mass spectrometry

MAX PLANCK GESELLSCHAFT

Electron impact ion source with field emission cathode