Inventor
KUO CHE-I
TW2 patents
Patents
2 patentsUS12237220B2Feb 25, 2025
Apparatus and methods for determining horizontal position of substrate using lasers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US12087625B2Sep 10, 2024
Apparatus and methods for determining horizontal position of substrate using lasers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56