Inventor
KAISE SEIICHI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “KAISE SEIICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS7245987B2Jul 17, 2007
Cluster tool and transfer control method
TOKYO ELECTRON LTD11 citations82
US9305817B2Apr 5, 2016
Method for purging a substrate container
TOKYO ELECTRON LTD13 citations78
US11735448B2Aug 22, 2023
Container, container partition plate, substrate processing system, and substrate transfer method
TOKYO ELECTRON LTD2 citations70
US6970770B2Nov 29, 2005
Cluster tool and method for controlling transport
TOKYO ELECTRON LTD11 citations69
US10010913B2Jul 3, 2018
Purging apparatus and purging method for substrate storage container
TOKYO ELECTRON LTD3 citations67
US7854821B2Dec 21, 2010
Substrate processing apparatus
TOKYO ELECTRON LTD2 citations62
US11631607B2Apr 18, 2023
Carrier and jig
TOKYO ELECTRON LTD1 citations60
US12285786B2Apr 29, 2025
Substrate processing apparatus, purge gas control method, and vacuum transfer chamber cleaning method
TOKYO ELECTRON LTD0 citations50
US12444632B2Oct 14, 2025
System of processing substrate, transfer method, transfer program, and holder
TOKYO ELECTRON LTD0 citations49