Inventor · disambiguated record
Milan Pliska
Also filed as: PLISKA MILAN
3 granted patents·3 pending applications·3 citations·filing 2014–2016
54Inventor score
Technology areasH10P
Files withLAM RES AG6
Top patents by PatentIndex Score
6 records- 0165US9779979B2Apparatus for liquid treatment of wafer shaped articlesLAM RES AG·Filed 2014·Granted Oct 3, 2017·2 cites·25 claims
- 0261US9972514B2Apparatus for liquid treatment of wafer shaped articlesLAM RES AG·Filed 2016·Granted May 15, 2018·1 cites·13 claims
- 0333US10483010B2Reduction of surface and embedded substrate charge by controlled exposure to vacuum ultraviolet (VUV) light in low-oxygen environmentLAM RES AG·Filed 2016·Granted Nov 19, 2019·0 cites·19 claims
- 0429US2016376702A1Dual mode chamber for processing wafer-shaped articlesLAM RES AG·Filed 2015·Application pending·0 cites
- 0529US2018096879A1Spin chuck including edge ringLAM RES AG·Filed 2016·Application pending·0 cites
- 0628US2018040502A1Apparatus for processing wafer-shaped articlesLAM RES AG·Filed 2016·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →