Inventor
HUANG WENJIN
US7 patents
⚠️ This page may combine multiple inventors who share the name “HUANG WENJIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
2 patentsUS11126092B2Sep 21, 2021
Methods for determining an approximate value of a processing parameter at which a characteristic of the patterning process has a target value
ASML NETHERLANDS BV3 citations70
US11733613B2Aug 22, 2023
Prediction of out of specification based on a spatial characteristic of process variability
ASML NETHERLANDS BV2 citations69