Inventor

TIMOFEEV NIKOLAY T

RU2 patents

Patents

2 patents

US6894284B2May 17, 2005

UV optical fluoride crystal elements for λ < 200nm laser lithography and methods therefor

CORNING INC2 citations58

US6838681B2Jan 4, 2005

Detection and making of ultralow lead contaminated UV optical fluoride crystals for <200nm lithography

CORNING INC4 citations57