Inventor
CHUNG KO-CHIN
TW7 patents
⚠️ This page may combine multiple inventors who share the name “CHUNG KO-CHIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
4 patentsUS6848882B2Feb 1, 2005
Apparatus and method for positioning a cassette pod onto a loadport by an overhead hoist transport system
TAIWAN SEMICONDUCTOR MFG41 citations87
US6678581B2Jan 13, 2004
Method of calibrating a wafer edge gripping end effector
TAIWAN SEMICONDUCTOR MFG50 citations87
US6950181B2Sep 27, 2005
Optical wafer presence sensor system
TAIWAN SEMICONDUCTOR MFG8 citations67
US6926920B2Aug 9, 2005
Chemical vapor deposition (CVD) calibration method providing enhanced uniformity
TAIWAN SEMICONDUCTOR MFG9 citations67