P

Inventor

ISHIKAWA DAI

JP54 patents
⚠️ This page may combine multiple inventors who share the name “ISHIKAWA DAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM IP HOLDING BV

22 patents
US10468251B2Nov 5, 2019

Method for forming spacers using silicon nitride film for spacer-defined multiple patterning

ASM IP HOLDING BV379 citations99
US9754779B1Sep 5, 2017

Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches

ASM IP HOLDING BV484 citations99
US9478414B2Oct 25, 2016

Method for hydrophobization of surface of silicon-containing film by ALD

ASM IP HOLDING BV465 citations99
US8785215B2Jul 22, 2014

Method for repairing damage of dielectric film by cyclic processes

ASM IP HOLDING BV521 citations99
US10014212B2Jul 3, 2018

Selective deposition of metallic films

ASM IP HOLDING BV397 citations98
US9190263B2Nov 17, 2015

Method for forming SiOCH film using organoaminosilane annealing

ASM IP HOLDING BV518 citations98
US9029272B1May 12, 2015

Method for treating SiOCH film with hydrogen plasma

ASM IP HOLDING BV526 citations98
US10529554B2Jan 7, 2020

Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches

ASM IP HOLDING BV377 citations97
US10480064B2Nov 19, 2019

Reaction chamber passivation and selective deposition of metallic films

ASM IP HOLDING BV47 citations97
US10041166B2Aug 7, 2018

Reaction chamber passivation and selective deposition of metallic films

ASM IP HOLDING BV57 citations97
US9805974B1Oct 31, 2017

Selective deposition of metallic films

ASM IP HOLDING BV66 citations97
US9803277B1Oct 31, 2017

Reaction chamber passivation and selective deposition of metallic films

ASM IP HOLDING BV87 citations97
US9353441B2May 31, 2016

Heating/cooling pedestal for semiconductor-processing apparatus

ASM IP HOLDING BV466 citations96
US10793946B1Oct 6, 2020

Reaction chamber passivation and selective deposition of metallic films

ASM IP HOLDING BV17 citations94
US10410857B2Sep 10, 2019

Formation of SiN thin films

ASM IP HOLDING BV13 citations84
US11784043B2Oct 10, 2023

Formation of SiN thin films

ASM IP HOLDING BV1 citations73
US11133181B2Sep 28, 2021

Formation of SiN thin films

ASM IP HOLDING BV3 citations73
US10811256B2Oct 20, 2020

Method for etching a carbon-containing feature

ASM IP HOLDING BV3 citations72
US9947582B1Apr 17, 2018

Processes for preventing oxidation of metal thin films

ASM IP HOLDING BV5 citations71
US11676812B2Jun 13, 2023

Method for forming silicon nitride film selectively on top/bottom portions

ASM IP HOLDING BV1 citations60
US10910262B2Feb 2, 2021

Method of selectively depositing a capping layer structure on a semiconductor device structure

ASM IP HOLDING BV1 citations60
US10720322B2Jul 21, 2020

Method for forming silicon nitride film selectively on top surface

ASM IP HOLDING BV1 citations60

HITACHI CHEMICAL CO LTD

9 patents

RENESAS TECH CORP

4 patents

OTSUKA PHARMA CO LTD

3 patents

ABE TOMIYA

3 patents

ISHIKAWA DAI

2 patents

PIONEER CORP

2 patents

RESONAC CORP

2 patents

SHOWA DENKO MATERIALS CO LTD

2 patents

HAYASHI YAMATO

1 patent

Showing the top 50 of 54 patents by PatentIndex Score.