Inventor

VO KHIEM D

US2 patents

Patents

2 patents

US6833913B1Dec 21, 2004

Apparatus and methods for optically inspecting a sample for anomalies

KLA TENCOR TECH CORP44 citations89

US7012683B2Mar 14, 2006

Apparatus and methods for optically inspecting a sample for anomalies

KLA TENCOR TECH CORP13 citations80