Inventor
KAMOHARA TOSHIHIRO
JP2 patents
Patents
2 patentsUS7758979B2Jul 20, 2010
Piezoelectric thin film, piezoelectric material, and fabrication method of piezoelectric thin film and piezoelectric material, and piezoelectric resonator, actuator element, and physical sensor using piezoelectric thin film
NAT INST OF ADVANCED IND SCIEN75 citations96
US7642693B2Jan 5, 2010
Wurtzite thin film, laminate containing wurtzite crystalline layer and their manufacturing methods
NAT INST OF ADVANCED IND SCIEN26 citations90