Inventor

CHEN YIHONG

US47 patents

⚠️ This page may combine multiple inventors who share the name “CHEN YIHONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEN YIHONG

APPLIED MATERIALS INC

Methods for self-aligned patterning

Seam healing using high pressure anneal

Apparatus for radical-based deposition of dielectric films

Methods for wordline separation in 3D-NAND devices

Selective deposition for simplified process flow of pillar formation

Methods for wordline separation in 3D-NAND devices

Methods for wordline separation in 3D-NAND devices

Selectively lateral growth of silicon oxide thin film

Methods for depositing tungsten on halosilane based metal silicide nucleation layers

Methods of lowering wordline resistance

Pre-treatment approach to improve continuity of ultra-thin amorphous silicon film on silicon oxide

Seamless tungsten fill by tungsten oxidation-reduction

Treatment approach to improve film roughness by improving nucleation/adhesion of silicon oxide

Conformal amorphous silicon as nucleation layer for W ALD process

Tungsten deposition without barrier layer

Apparatus for radical-based deposition of dielectric films

Selectively lateral growth of silicon oxide thin film

Chamber coatings

Methods of forming nucleation layers with halogenated silanes

Conformal doped amorphous silicon as nucleation layer for metal deposition

Selective atomic layer deposition of ruthenium

Nucleation-free gap fill ALD process

Enhanced spatial ALD of metals through controlled precursor mixing

Nucleation-free gap fill ALD process

Methods of forming self-aligned vias

Ultra-thin diffusion barriers

Enhanced spatial ALD of metals through controlled precursor mixing

Ultra-thin diffusion barriers

Deposition of conformal and gap-fill amorphous silicon thin-films

Surface-selective atomic layer deposition using hydrosilylation passivation

Oxidative volumetric expansion of metals and metal containing compounds

Methods for gapfill in high aspect ratio structures

Methods of forming self-aligned vias

Oxidative volumetric expansion of metals and metal containing compounds

Ultra-thin dielectric diffusion barrier and etch stop layer for advanced interconnect applications

Tungsten deposition without barrier layer

Selectively lateral growth of silicon oxide thin film

Methods of forming tungsten pillars

Metal-containing films as dielectric capping barrier for advanced interconnects

VILLARRUEL FERNANDO X

Transamplifier, system and method for amplification of optical signals at plural wavelengths

Amplified wavelength broadband video distribution architectures

Amplified wavelength broadband video distribution architectures using a phase modulating waveguide

JDS UNIPHASE INC

Simultaneous single mode and multi-mode propagation of signals in a double clad optical fiber

CHEN YIHONG

Handheld fan

KANAN MATTHEW W

Catalysts for low temperature electrolytic CO2 reduction

SUBBARAMAN HARISH

Method for fabricating and packaging an M×N phased-array antenna

UNIV ZHEJIANG

Method for morphology identification, trajectory tracking and velocity measurement of high-concentration microbubbles