Inventor
JIANG SHISHI
US20 patents
⚠️ This page may combine multiple inventors who share the name “JIANG SHISHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
19 patentsUS10529585B2Jan 7, 2020
Dry stripping of boron carbide hardmask
APPLIED MATERIALS INC19 citations94
US10636669B2Apr 28, 2020
Seam healing using high pressure anneal
APPLIED MATERIALS INC15 citations86
US10886140B2Jan 5, 2021
3D NAND etch
APPLIED MATERIALS INC9 citations84
US10460933B2Oct 29, 2019
Two-step process for gapfilling high aspect ratio trenches with amorphous silicon film
APPLIED MATERIALS INC5 citations84
US10559497B2Feb 11, 2020
Seamless tungsten fill by tungsten oxidation-reduction
APPLIED MATERIALS INC2 citations73
US11615966B2Mar 28, 2023
Flowable film formation and treatments
APPLIED MATERIALS INC2 citations71
US11578409B2Feb 14, 2023
Low deposition rates for flowable PECVD
APPLIED MATERIALS INC0 citations62
US11177128B2Nov 16, 2021
Apparatus and methods for manufacturing semiconductor structures using protective barrier layer
APPLIED MATERIALS INC0 citations62
US11011384B2May 18, 2021
Gapfill using reactive anneal
APPLIED MATERIALS INC0 citations62
US11515170B2Nov 29, 2022
3D NAND etch
APPLIED MATERIALS INC0 citations61
US11227797B2Jan 18, 2022
Film deposition using enhanced diffusion process
APPLIED MATERIALS INC0 citations60
US10818490B2Oct 27, 2020
Controlled growth of thin silicon oxide film at low temperature
APPLIED MATERIALS INC0 citations52
US10699903B2Jun 30, 2020
Two-step process for gapfilling high aspect ratio trenches with amorphous silicon film
APPLIED MATERIALS INC0 citations52
US10643841B2May 5, 2020
Surface modification to improve amorphous silicon gapfill
APPLIED MATERIALS INC0 citations52
US10483102B2Nov 19, 2019
Surface modification to improve amorphous silicon gapfill
APPLIED MATERIALS INC0 citations52
US10714339B2Jul 14, 2020
Selectively deposited parylene masks and methods related thereto
APPLIED MATERIALS INC0 citations51
US12054827B2Aug 6, 2024
Flowable film curing using H2 plasma
APPLIED MATERIALS INC0 citations49
US10784107B2Sep 22, 2020
Methods of forming tungsten pillars
APPLIED MATERIALS INC0 citations42
US10580642B2Mar 3, 2020
Two-step process for silicon gapfill
APPLIED MATERIALS INC0 citations41